Semiconductors & Integrated Circuits
Hydrogen-Doped Germanium Nanomembranes for Photodetectors
Inventors: Zhenqiang Ma, Munho Kim
Photodetectors based on hydrogen-doped, single-crystalline germanium, including waveguide integrated photodetectors for photonic chip applications are provided. Hydrogen doping provides the single-crystalline germanium with increased radiation absorption in the near infrared region of the electromagnetic spectrum, including at wavelengths of 1550 nm and above.