Stiction-Aided Fabrication Of Flat Semiconductor Nanomembranes For Microelectronics Applications
Inventors: Paul Evans, Gokul Gopalakrishnan
Methods for forming stable, suspended semiconductor nanomembranes are provided. Also provided are stable, suspended semiconductor nanomembranes made using the methods and electronic devices that incorporate the stable, suspended semiconductor nanomembranes as electronically active layers. The methods utilize stiction-aided nanomembrane flattening combined with ultraviolet (UV) radiation-induced adhesion enhancement.
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