Wisconsin Alumni Research Foundation

Engineering
Engineering
Stiction-Aided Fabrication Of Flat Semiconductor Nanomembranes For Microelectronics Applications
WARF: P180240US02

Inventors: Paul Evans, Gokul Gopalakrishnan


The Invention
Methods for forming stable, suspended semiconductor nanomembranes are provided. Also provided are stable, suspended semiconductor nanomembranes made using the methods and electronic devices that incorporate the stable, suspended semiconductor nanomembranes as electronically active layers. The methods utilize stiction-aided nanomembrane flattening combined with ultraviolet (UV) radiation-induced adhesion enhancement.
Additional Information
For More Information About the Inventors
For current licensing status, please contact Michael Carey at [javascript protected email address] or 608-960-9867

WARF