Wisconsin Alumni Research Foundation

Semiconductors & Integrated Circuits
Semiconductors Integrated Circuits
Metal-Organic Pulsed Laser Deposition For Stoichiometric Complex Oxide Thin Films
WARF: P170257US01

Inventors: Chang-Beom Eom, Jungwoo Lee

The Invention
Methods and systems for forming complex oxide films are provided. Also provided are complex oxide films and heterostructures made using the methods and electronic devices incorporating the complex oxide films and heterostructures. In the methods pulsed laser deposition is conducted in an atmosphere containing a metal-organic precursor to form highly stoichiometric complex oxides.
Additional Information
For More Information About the Inventors
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