Wisconsin Alumni Research Foundation

Analytical Instrumentation, Methods & Materials
Analytical Instrumentation Methods Materials
Ion Source
WARF: P170357US01

Inventors: Andrew Seltzman

The Invention
An ion source device for producing an ion beam may include a housing having an opening, a first electrode, and a second electrode. A portion of the first electrode and the second electrode may be located within the housing. The first electrode may have a first side facing the opening and may be configured to provide an electric field toward the opening. The second electrode may be configured to provide an electron presence between the first electrode and the opening at least at times when the first electrode is not providing the first electric field. The ion source device may include a magnet and may produce a magnetic field generally perpendicular to the electric field provided by the first electrode. The ion source device may provide an ion beam with low turn on delay, which may be on the order of one microsecond or less, and low turn on jitter.
For current licensing status, please contact Michael Carey at [javascript protected email address] or 608-960-9867