Analytical Instrumentation, Methods & Materials
Apparatus For High-Speed Surface Relief Measurement
WARF: P190233US01
Inventors: Zongfu Yu, Soongyu Yi
The Invention
An apparatus for measurement of surface relief provides a phase sensitive camera and processing to reconstruct a wavefront profile matching the surface when illuminated with a known light source thereby providing noncontact surface relief measurements
Additional Information
For More Information About the Inventors
Tech Fields
For current licensing status, please contact Michael Carey at [javascript protected email address] or 608-960-9867