Semiconductors & Integrated Circuits
Seeded Solid-Phase Crystallization Of Transparent Conducting Vanadate Perovskites
Inventors: Paul Evans, Thomas Kuech, Donald Savage, Yajin Chen, Samuel Marks
Transparent, electrically conductive vanadium oxide-based perovskite films and methods of making the vanadium oxide-based perovskite films are provided. Transparent conducting vanadate perovskites are made by forming a layer of amorphous vanadate perovskite precursor around a plurality of nanoscale, crystalline, perovskite oxide seeds and heating the layer of amorphous vanadate perovskite precursor at a temperature that favors lateral vanadate perovskite crystal growth from the perovskite oxide seeds over homogeneous crystal nucleation within the layer of amorphous vanadate perovskite precursor material.