Semiconductors & Integrated Circuits
Vanadium Dioxide-Based Optical And Radiofrequency Switches
Inventors: Zhenqiang Ma, Chang-Beom Eom, Jaeseong Lee, Daesu Lee, Sang June Cho, Dong Liu
Switches for electromagnetic radiation, including radiofrequency switches and optical switches, are provided. Also provided are methods of using the switches. The switches incorporate layers of high quality VO2 that are composed of a plurality of connected crystalline VO2 domains having the same crystal structure and orientation.