Semiconductors & Integrated Circuits
Integration Of Semiconductor Membranes With Piezoelectric Substrates
Inventors: Max Lagally, Abhishek Bhat, Frank Flack, Shelley Scott, Robert Blick
Piezoelectrically actuated devices constructed from thin semiconductor membranes bonded directly to piezoelectric substrates are provided. Methods for fabricating these devices are also provided. The bonding of the semiconductor to the piezoelectric material does not require the use of any intermediate layers, such as bonding agents.